Applied Nanotools (ANT) Silicon Nitride (SiN) 
  
Applied Nanotools (ANT) Silicon Nitride (SiN only, no Si)
Silicon nitride with device layer thickness 400um and buffer oxide Layer thickness 4.5um, using 100 keV electron beam lithography technology. One metal level for routing plus metal heater. Detailed is at: https://www.appliednt.com/nanosoi/sys/resources/specs_nitride/
 
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