Applied Nanotools (ANT) NanoSOI Fabrication Proces
  
Applied Nanotools (ANT) NanoSOI Fabricaiton Process (Si only, no SiN)
SOI, 220 nm top Si, 2000 nm BOX
100 keV electron-beam lithography for waveguides
One metal level for routing plus metal heater
Future options include implants for optical modulators
 
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